Clean room air system
US5014608A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1990 |
| Grant date | May 14, 1991 |
| Priority date | — |
| Expiry date | Aug 17, 2010 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F3/167
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A clean room is supplied with air at a controllable velocity from a blower with a variable damper mechanism. The ceiling of the clean room is comprised of a plurality of panels of particulate filter material. Associated with at least some of said panels are air dampers comprised of first and second adjacent perforated plates. The first plate is fixed and the second plate is mounted for translational movement relative to the first. By moving the second plate relative to the first, the perforations therein are selectably opened or occluded, permitting the air passing through each panel to be regulated. Air flow through the room as a whole is controlled by the variable air flow feature of the blower.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.