Method and apparatus for testing optical components
US5015096A · kind A · utility
Inventors
Key dates
| Filing date | Oct 24, 1988 |
| Grant date | May 14, 1991 |
| Priority date | — |
| Expiry date | Oct 24, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/2861
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for scanning and testing optical components is disclosed. An incident laser beam is directed at a trihedral retroreflector and is redirected by the trihedral retroreflector onto a test surface. The trihedral retroreflector is movable in X and Y directions over the test surface, in a plane perpendicular to the incident beam, scanning the incident beam over the test surface. The reflected beam from the test surface is redirected by the trihedral retroreflector to measurement instrumentation including a photodetector. If the test surface is planar, the reflected beam retraces the path of the incident beam independent of the translation of the trihedral retroreflector. Irregularities in the test surface cause deflections of the reflected beam. The linear scanning range, in both X and Y direction, of a single trihedral retroreflector of diameter "d" is the value (d times 2). The linear scanning range of a series of "n" trihedral retroreflectors of diameter "d" is the value (d times 2.sup.n).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.