Patent · US Expired

Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method

US5015097A · kind A · utility

21Cited by
0References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 4, 1989
Grant dateMay 14, 1991
Priority date
Expiry dateOct 4, 2009

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30141
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for inspecting the filled state of a plurality of via-holes which pass through a non-conductive circuit board and are filled with a conductive substance and an apparatus for carrying out the method are disclosed. The surface of the circuit board is illuminated in two directions to generate shadows depending on the concave or convex state of the fillers in a plurality of via-holes. An optical image of the illuminated surface of the circuit board is detected. Each edge of the two shadow areas, which exist in the detected optical image and are generated in one via-hole by light irradiation in two directions, is detected. Whether the filler in this one via-hole is in the concave state or convex state is identified according to the mutual position relationship of the detected edges. The length of each shadow area is detected, and whether the concave state or convex state of the filler is within a predetermined allowance is decided according to the detection results. The area of the image of the filler is detected according to differences between the brightness of the board surface or of the via-hole wall and the brightness of the filler in the via-hole in the detected optical i…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.