Organometallic compounds

US5015747A · kind A · utility

Assignee

• Merck Patent GmbH · DE

Inventors

• Martin Hostalek · Darmstadt, DE
• Ludwig Pohl · Darmstadt, DE
• Dietrich Erdmann · Mühltal, DE
• Herbert Schumann · Berlin, DE
• Uwe Hartmann · Berlin, DE
• Meino Heyen · Aachen, DE
• Holger Jurgensen · Aachen, DE

Key dates

• Filing date: Apr 7, 1989
• Grant date: May 14, 1991
• Expiry date: Apr 7, 2009

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C07F5/00
• WIPO field: Organic fine chemistry
• WIPO sector: Chemistry

Abstract

The invention relates to organometallic compounds which are stabilized intramolecularly and have a cyclic or bicyclic structure and to the use thereof for the preparation of thin films and epitaxial layers by gas phase deposition.