Electrostatic levitation control system for micromechanical devices
US5015906A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 3, 1989 |
| Grant date | May 14, 1991 |
| Priority date | — |
| Expiry date | Nov 3, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A mass to be levitated is provided with an electrically conductive surface that is acted upon by an oscillating electrical force field generated by a plurality of charged conductive plates. The levitated mass is kept in static equilibrium in the electric field by driving the resonant circuit with an applied time varying voltage that has a frequency greater than the natural frequency of the resonant circuit. Motion of the mass is accomplished by providing actuator elements that are selectively charged to attract the mass in a given direction. Alternatively, the mass may be moved by employing a plurality of levitation control circuits that are sequentially energized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.