Electronic feeder for an ion pump
US5017836A · kind A · utility
0Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 1989 |
| Grant date | May 21, 1991 |
| Priority date | — |
| Expiry date | Mar 30, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J41/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved electronic device allows for the feeding of an ion pump with a plurality of voltages that are changed as a function of the current drawn by the pump and therefore of the pressure value within the pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.