Patent · US Expired

Method and device for the operation of a workpiece-contacting probe head of the switching type

US5018280A · kind A · utility

16Cited by

12References

15Claims

0Family size

Assignee

Carl-Zeiss-Stiftung, Heidenheim/Brenz · DE

Inventors

Eckhard Enderle · Aalen, DE
Hans-Peter Aehnelt · Oberkochen, DE
Karl-Eugen Aubele · Geislingen an der Steige, DE
Michael Wirth · San Antonio, US

Key dates

Filing date	Jul 20, 1990
Grant date	May 28, 1991
Priority date	—
Expiry date	Jul 20, 2010

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/007
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

To overcome friction in the mount of the switching-type probe head, a probe (5/6) displaceably mounted therein is transiently excited in oscillation for a predetermined time after each contacting process. The same piezoelectric element (17) as that which produces the initial work-contact signal in the probe head can additionally be used to stimulate the oscillations.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.