Methods and means for full-surface interferometric testing of grazing incidence mirrors
US5018861A · kind A · utility
7Cited by
2References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 22, 1989 |
| Grant date | May 28, 1991 |
| Priority date | — |
| Expiry date | Jun 22, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed method and means measure the characteristics of an optical device by directing light waves by normal-incidence sub-aperture interferometry on the optical device, shear-polarizing the light directed onto the optical device, and analyzing the results of the interference to obtain the characteristics of the optical device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.