Patent · US Expired

Semiconductor device and method of fabricating the same

US5019891A · kind A · utility

23Cited by
6References
39Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 12, 1989
Grant dateMay 28, 1991
Priority date
Expiry dateJan 12, 2009

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/12625
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device and the method of fabricating the semiconductor device include a semiconductor substrate and a plurality of conductor films formed on the substrate. Each of the conductor films is made of aluminum alloy including at least one element selected from palladium and platinum and, more preferably, further including at least one element selected from lithium, beryllium, magnesium, manganese, iron, cobalt, nickel, copper, lanthanum, cerium, chromium hafnium, zirconium, cadmium, titanium, tungsten, vanadium, tantalum, and niobium, with a protective film which includes oxide of the selected one of palladium and platinum being formed on the side wall of the conductor film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.