Low pressure transducer using metal foil diaphragm
US5020377A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 23, 1990 |
| Grant date | Jun 4, 1991 |
| Priority date | — |
| Expiry date | Jan 23, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A low pressure transducer is disclosed which utilizes a stainless steel foil diaphragm. An electrically conductive layer is deposited onto a non-conductive planar disk to form one plate of a capacitor. An epoxy ring is silk-screened onto the non-conductive plate to form an insulative washer between the stainless steel foil and the conductive layer on the non-conductive plate. A stainless steel ring is placed on top of the stainless steel foil and pressed down toward the non-conductive plate until the capacitance formed by the conductive layer screened onto the non-conductive plate and the stainless steel foil diaphragm reaches a predetermined level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.