Production of nitrogen compounds
US5021134A · kind A · utility
5Cited by
3References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 1990 |
| Grant date | Jun 4, 1991 |
| Priority date | — |
| Expiry date | May 4, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/12
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method for the production of a nitride of zirconium, hafnium, silicon, germanium, tin, lead, boron, aluminium, gallium, indium or thallium either alone or as mixtures is claimed. Ammonia and a halide of at least one of these elements are heated by means of a direct electric current plasma in a non-oxidizing gas in a reactor in which recirculation is induced such that the defined recirculation ratio is greater than 2.5 and preferably greater than 4.0. Any titanium halide present shall be less then 40% by weight of mixed halides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.