Method of forming patterned oxide superconducting films
US5021398A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 1989 |
| Grant date | Jun 4, 1991 |
| Priority date | — |
| Expiry date | Oct 26, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/734
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention describes a method to produce a patterned superconducting solid preferably as a thin film. Unsaturated organic acid metal salts of suitable metals are dissolved in an organic solvent, mixed thoroughly and cast as a film on a substrate. The concentration of these organic carboxylate metal salts is adjusted such that a superconducting metal oxide ratio is obtained upon pyrolysis at temperatures up to 1000.degree. C. with subsequent slow cooling. A pattern (mask) is placed over the film and the film is irradiated to polymerize and crosslink the exposed portions. The unpolymerized and uncrosslinked portions are removed usually by using selective solvents or solvent mixtures. The solid remaining is heated in oxygen or air to about 1000.degree. C., which removes the organic portions and leaves metal oxide residue. The metal oxides are then cooled slowly and annealed to produce the patterned metal oxide superconducting materials. The articles of manufacture produced are useful in fabricating devices requiring superconducting thin films in addition to other uses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.