Plasma generator utilizing dielectric member for carrying microwave energy
US5023056A · kind A · utility
26Cited by
8References
68Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1989 |
| Grant date | Jun 11, 1991 |
| Priority date | — |
| Expiry date | Dec 27, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0894
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generator utilizes a dielectric member for carrying microwave energy from a microwave source directly into the hot zone of a thermally heated semiconductor process reaction chamber. The member carries the microwave energy much like fiber optics carries light so that the microwave energy may be delivered to and emitted at a specific preselected position within the chamber. A plasma can be formed and located directly over or near substrates so that a more highly controlled deposition and/or etching process may take place.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.