Cantilever beam radiation deflector assembly
US5024500A · kind A · utility
46Cited by
20References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1988 |
| Grant date | Jun 18, 1991 |
| Priority date | — |
| Expiry date | Dec 2, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/357
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical cantilever beam (1) for use in an optical switch or other radiation deflector assembly includes a beam portion (2) comprising two parallel arms (5,6) hinged at one end to a supporting substrate (4) and at the other end to a load portion (3) which provides the major proportion of the total mass of the cantilever beam. The beam is deflected by the application of an electrostatic potential between electrodes on opposing surfaces (8,9) of the load portion and the supporting substrate respectively. The structure has improved switching performance in operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.