Dynamic focusing electron gun
US5025189A · kind A · utility
18Cited by
5References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 3, 1989 |
| Grant date | Jun 18, 1991 |
| Priority date | — |
| Expiry date | Nov 3, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J29/628
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A dynamic focusing electron gun for high resolution includes a triode part and a main lens. The main lens includes a first focusing electrode disposed proximate the triode part, a second focusing electrode disposed proximate an anode electrode, a static potential electrode and a dynamic potential electrode disposed between the first and second focusing electrodes to form a dynamic quadrupole lens. The dynamic focusing electron gun produces a high resolution image with a small radius beam spot with low astigmatism, low spherical aberration, and good voltage endurance characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.