Metal-containing polymer and production process thereof
US5026887A · kind A · utility
Inventor
Key dates
| Filing date | Mar 26, 1990 |
| Grant date | Jun 25, 1991 |
| Priority date | — |
| Expiry date | Mar 26, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G77/60
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A metal-containing polymer represented by the general formula: ##STR1## where M represents a group IV metal atom, X represents N(SiR.sup.1 R.sup.2 R.sup.3).sub.2 or N(R.sup.4)SiR.sup.1 R.sup.2 R.sup.3, each of R.sup.1, R.sup.2, R.sup.3 and R.sup.4 represents an alkyl group or aryl group, Ar represents a (substituted) phenylene, (substituted) naphthylene or (substituted) anthrylene group, and n represents an integer of 2 to 5000. The polymer can be produced by the oxidation-reduction alternating copolymerization using a reductant monomer represented by MX.sub.2 as and substituted-benzoquinones, -naphthoquinones or -anthraquinones as the oxidant monomer. The polymer is solvent-soluble and can be used as functional materials such as resist materials, electronic materials, etc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.