Patent · US Expired

Examination of surface structure

US5028132A · kind A · utility

6Cited by

0References

4Claims

0Family size

Assignee

BASF SE

Inventors

Werner Hickel · Ludwigshafen, DE
Wolfgang Knoll · Mainz, DE
Benno Rothenhaeusler · Bürgberg, DE

Key dates

Filing date	Mar 16, 1990
Grant date	Jul 2, 1991
Priority date	—
Expiry date	Mar 16, 2010

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/306
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A technique for examining surface structures which differ in respect of refractive index and/or height modulation of the surface comprises introducing these surface structures into a plasmon surface polariton field and scanning them by means of surface plasmon microscopy.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.