Fluid isolated self-compensating absolute pressure sensor transducer
US5029478A · kind A · utility
18Cited by
10References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 19, 1990 |
| Grant date | Jul 9, 1991 |
| Priority date | — |
| Expiry date | Jul 19, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/142
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An absolute pressure sensor capsule and sensor resulting therefrom are disclosed. In one preferred embodiment, the capsule includes a sensor die of a first material, an intermediate spacer of a second material joined to the die and a base plate of a third material, the base plate having a variable thickness for changing the span shift, null shift, and static pressure of the die while compensating for changes in the calibration of the electrical die components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.