System for vibration isolation of FT-IR interferometers
US5030007A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 1989 |
| Grant date | Jul 9, 1991 |
| Priority date | — |
| Expiry date | Oct 5, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/453
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an on-line scanning sensor system, certain components of an FT-IR interferometer are isolated from vibrations that cause inaccuracies in measurements provided by the system, thereby allowing the sensor system to be used on-line in manufacturing environments. More particularly, vibration-absorbing suspension devices suspend selected interferometer components such that the center of suspension of the suspended interferometer component is substantially coincident with the center of gravity of the suspended components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.