Plasma-enhanced CVD coating process

US5030475A · kind A · utility

Assignee

• Schott Glaswerke · DE

Inventors

• Ulrich Ackermann · Mainz, DE
• Ralf Kersten · Niedernhausen, DE
• Heinz-Werner Etzkorn · Neu-Anspach, DE
• Volker Paquet · Mainz, DE
• Uwe Rutze · Mainz, DE

Key dates

• Filing date: Sep 6, 1989
• Grant date: Jul 9, 1991
• Expiry date: Sep 6, 2009

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02T50/60
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A plasma or photo-induced chemical vapor deposition coating process and apparatus are provided for applying thin dielectric coatings on planar, curved, and large area substrates. A plasma is generated in a tubular outer conductor. This plasma or the UV radiation occurring in the plasma passes through an opening into a reaction chamber. The opening preferably extends axially along the outer conductor and communicates with the interior of the reaction chamber. At least one component of the reaction gas is introduced directly to the opening or into the reaction chamber adjacent to the opening, bypassing the outer conductor. In this apparatus, the reactive deposition of a coating onto a substrate occurs only in the reaction chamber and below the opening from the outer conductor.