Patent · US Expired

Coordinate measuring apparatus

US5031331A · kind A · utility

22Cited by

12References

15Claims

0Family size

Assignee

Carl Zeiss Stiftung · DE

Inventors

Klaus Herzog · Oberkochen, DE
Karl Seitz · Oberwil, CH
Karl Schepperle · Oberkochen, DE
Peter hnelt · Oberkochen, DE

Key dates

Filing date	Dec 11, 1989
Grant date	Jul 16, 1991
Priority date	—
Expiry date	Dec 11, 2009

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/005
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A coordinate measuring apparatus includes guides made of aluminum. Scales which are also made of aluminum are used to measure the position of the measuring slide movable on the guides. In a preferred embodiment, the scales are in the form of a reflection phase grating and are applied directly to the surface of the guide member. In addition, a temperature sensor is provided which measures the temperature of the guide member and of the scale divisions. A method of producing the scale divisions is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.