Film deposition system
US5031408A · kind A · utility
5Cited by
21References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 11, 1989 |
| Grant date | Jul 16, 1991 |
| Priority date | — |
| Expiry date | Sep 11, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/221
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A cryocrucible permits the introduction of ion clusters of a cryogen, like oxygen or nitrogen, to a vacuum chamber, and preferably comprises a liquid cryogen containment vessel connected to an expansion chamber through a solenoid-actuated valve, a cooling means for maintaining the cryogen as a liquid in the containment vessel, and a nozzle connecting the expansion chamber to the vacuum chamber. Liquid evaporates through the valve into the expansion chamber and, then, forms clusters when it expands further while passing through the nozzle into the vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.