UV absorption control of thin film growth
US5032435A · kind A · utility
31Cited by
5References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1989 |
| Grant date | Jul 16, 1991 |
| Priority date | — |
| Expiry date | Mar 27, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/52
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for monitoring and controlling the rate of growth of thin films in an atmosphere of reactant gases measures the UV absorbance of the atmosphere and calculates the partial pressure of the gases. The flow of reactant gases is controlled in response to the partial pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.