Apparatus and method for measuring the time evolution of carriers propogating within submicron and micron electronic devices
US5034903A · kind A · utility
Inventors
Key dates
| Filing date | Jan 30, 1989 |
| Grant date | Jul 23, 1991 |
| Priority date | — |
| Expiry date | Jan 30, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for determining and displaying the time evolution profile of electron carriers present within a submicron or micron device comprises a laser for generating a beam of ultrafast pulses of ultraviolet light. A first beam splitter splits each pulse into a transmitted beam and a reflected beam. The transmitted beam travels through a time delay circuit, and is then converted into a train of ultrafast electrical pulses which are transmitted to the device. The reflected beam is focused on the device. An electron detector, also focused on the device, collects the ejected electrons resulting from the interaction of the light pulse and electrical pulse to produce an electrical signal. The signal is then magnified in intensity by an amplifier and directed at a cathode ray tube to cause an image to appear thereon. A SIT vidicon camera converts the image into an electrical signal and transmits the signal to a computer. The computer generates a time evolution profile from the signal received which is sent to a monitor for display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.