Method of producing thin sheets and use of such sheets for the production of X-ray masks

US5034972A · kind A · utility

Assignee

• Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

• Werner Schomburg · Remchingen, DE
• Werner Schelb · Remchingen, DE
• Gerhard Stern · Linz, AT

Key dates

• Filing date: Jun 21, 1990
• Grant date: Jul 23, 1991
• Expiry date: Jun 21, 2010

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S430/167
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method of producing thin sheets that are stretched over a frame and have planar and smooth surfaces with a low density of defects, and to the use of such sheets for the production of X-ray masks, wherein the sheet material is applied to a substrate through the intermediary of a release layer, whereupon the sheet is connected with the frame and separated from the substrate. During application of the release layer to the substrate, an area along the entire edge of the substrate is left free of the release layer material but is convered by the subsequently applied sheet material. Thereafter the sheet is connected with the frame in a region overlying the release layer and is severed around the periphery of the frame. Finally, the sheet and frame are released from the substrate and any release layer material remaining on the sheet is removed. The resulting sheet and frame arrangement may then be used to form an X-ray mask by applying desired X-ray absorber structures to the surface of the sheet. Alternatively the X-ray absorber structures may be formed on the surface of the sheet prior to attachment of the frame.