Patent · US Expired

Aqueous developer solution having hydroxy-alkyl piperidine for positive-working photoresists

US5039595A · kind A · utility

8Cited by

7References

5Claims

0Family size

Assignee

BASF SE

Inventors

Reinhold Schwalm · Monsheim, DE
Horst Binder · Lampertheim, DE

Key dates

Filing date	Aug 9, 1989
Grant date	Aug 13, 1991
Priority date	—
Expiry date	Aug 9, 2009

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/322
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An aqueous developer solution contains, as a water-soluble basic compound, a compound of the general formula (I) ##STR1## where R.sup.1 to R.sup.5 are identical or different and are each H, OH, hydroxyalkyl, alkoxy or alkyl. It is suitable for developing positive-working photoresists.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.