Electrodeless microwave-generated radiation apparatus
US5039918A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Apr 6, 1990 |
| Grant date | Aug 13, 1991 |
| Priority date | — |
| Expiry date | Apr 6, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/044
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrodeless microwave-generated radiation apparatus includes a microwave cavity wall made of metal material defining a microwave cavity, a lamp arranged in the microwave cavity containing emission material, a microwave generator supplying microwaves for exciting the emission material in the lamp, a microwave-coupling means coupling microwaves to the lamp through a waveguide, and a dielectric mirror arranged behind the lamp. The rise time of the apparatus can be remarkably shortened compared with the known art so that the damage of a magnetron can be reduced. The intensity of emission along the lamp is controlled by a projection or parasitic element. Further, by the use of a dielectric mirror, the object can be processed without temperature of the object to rise too high.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.