High temperature superconductor detector fabrication process
US5041188A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 1990 |
| Grant date | Aug 20, 1991 |
| Priority date | — |
| Expiry date | Jun 12, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/82
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A high temperature superconductor (HTS) fabrication process employs a two level metal deposition sequence for depositing a layer of metal (14, 18) over HTS material (12) to protect the HTS material from subsequent, possibly deleterious, processing steps. The process of the invention provides a capability for both patterning a HTS film material and electrically contacting the film using conventional photolithographic processes. The process of the invention furthermore accomplishes these objectives without degrading the superconducting properties of the film. The two level metal process protects the film from aqueous based processes such as photoresist development. The two level metal process furthermore does not require processes such as aqueous based chemical etching or ion milling of the surfaces of the superconducting film, thereby eliminating at least two processes which are known to degrade the superconducting properties of HTS material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.