Highly pure alkyl and aryl phosphines for gas phase epitaxy processes
US5041676A · kind A · utility
4Cited by
7References
23Claims
0Family size
Inventor
Key dates
| Filing date | Dec 15, 1989 |
| Grant date | Aug 20, 1991 |
| Priority date | — |
| Expiry date | Dec 15, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F9/505
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A process for the production of highly pure alkyl and arylphosphines for gas phase epitaxy processes through the reduction of alkyl and arylphosphinic acid or alkyl and arylphosphonic acid derivatives, with substituted alkali metal aluminum hydrides in a high-boiling solvent such as 1-methylnaphthalin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.