Secondary ion mass spectrometry apparatus
US5041725A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 18, 1990 |
| Grant date | Aug 20, 1991 |
| Priority date | — |
| Expiry date | Jul 18, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2258
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A secondary ion mass spectrometry apparatus for analyzing an element contained in the sample by radiating a primary ion beam extracted from an ion source to an analytical sample through a focusing system. The secondary ion mass spectrometry apparatus comprises an input unit for inputting data containing analytical elements names and areas, a storage unit for storing operational expressions to be operated on the input data from the input unit and a table to be reference on the input data and the results operated by the operational expressions and from which the necessary data is read, and a control unit for setting focusing conditions of said focusing system using the input data inputted from said input unit and the operational expressions and tables stored in the storage unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.