Method of making fused silica by decomposing siloxanes
US5043002A · kind A · utility
106Cited by
5References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1990 |
| Grant date | Aug 27, 1991 |
| Priority date | — |
| Expiry date | Aug 16, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/85
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
This invention relates to the production of high purity fused silica glass through oxidation or flame hydrolysis of a vaporizable silicon-containing compound. More particularly, this invention is directed to the use of vaporizable, halide-free compounds in said production. In the preferred practice, a polymethylsiloxane comprises said vaporizable, halide-free compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.