Patent · US Expired

Photoelectron microscope

US5045696A · kind A · utility

21Cited by
4References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 16, 1990
Grant dateSep 3, 1991
Priority date
Expiry dateMar 16, 2010

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2231/5056
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A photoelectron microscope wherein a normal conductive coil is used to produce a divergent magnetic field to form an enlarged photoelectron image of a specimen to be examined. The coil is only momentarily energized by pulse current, and in synchronism with the energization of the coil and while the change of the resultant magnetic field with time is small, the radiation source is actuated to produce a radiation pulse so that the photoelectrons produced upon irradiation of a specimen with the pulse flies through the magnetic field so as to be received by an image forming device. The image forming device is operated in synchronism with and a predetermined variable period of time after the actuation of the radiation source thereby to obtain photoelectron images of the specimen of different energy levels. By skimming only those photoelectrons of low energy which are emitted close to the axis of the magnetic field, it is possible to obtain images of high resolution.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.