Method of forming superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x thin films with controlled crystal orientation

US5047385A · kind A · utility

Assignee

• The Board of Trustees of the Leland Stanford Junior University · US

Inventors

• Malcolm R. Beasley · Palo Alto, US
• Kookrin Char · Palo Alto, US
• Theodore H. Geballe · Woodside, US
• Robert H. Hammond · Los Altos, US
• Aharon Kapitulnik · Palo Alto, US
• Andy Kent · Neuchâtel, CH
• Michio Naito · Tokyo, JP
• Byungdu Oh · Seoul, KR

Key dates

• Filing date: Jul 20, 1988
• Grant date: Sep 10, 1991
• Expiry date: Jul 20, 2008

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S505/742
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method of forming a superconducting YBa.sub.2 Cu.sub.3 O.sub.7-x thin film with selected crystal orientation is described which comprises the steps of sputtering simultaneously Y, Ba and Cu onto the surface of a substrate, introducing oxygen at said surface during deposition, controlling the stoichiometry of the elements Y, Ba or both richer or poorer than the 1:2:3 stoichiometry within a few atom percent and followed by annealing to selectively grow an a-axis or a c-axis oriented film of YBa.sub.2 Cu.sub.3 O.sub.7-x.