Helium leak detection method and system
US5049168A · kind A · utility
12Cited by
8References
7Claims
0Family size
Inventor
Key dates
| Filing date | Oct 29, 1990 |
| Grant date | Sep 17, 1991 |
| Priority date | — |
| Expiry date | Oct 29, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of separating a lighter gas from heavier gases, in which a molecular drag pump is used. A series of support pumps are connected to the exhaust port of the molecular drag pump. A gas to be separated out from a mixture of gases is introduced at an exhaust port of one of the pumps, with the lighter gas among them traveling upstream through the molecular drag pump, into a container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.