Patent · US Expired

Method of manufacturing solid bodies

US5049406A · kind A · utility

11Cited by

6References

7Claims

0Family size

Assignee

U.S. Philips Corporation · US

Inventors

Peter E. E. Geittner · Aachen, DE
Hans Lydtin · Stolberg, DE

Key dates

Filing date	Jul 11, 1989
Grant date	Sep 17, 1991
Priority date	—
Expiry date	Jul 11, 2009

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/44
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A substrate (35) is coated by using starting materials which are supplied in the form of clusters (28). The clusters are disintegrated into their molecular or atomic constituents, and the constituents are deposited on the substrate in the form of compact layers (34). In this manner it is attained that the layers have a defined structure and do not exhibit inclusions in the form of foreign molecules.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.