Microbridge flow sensor
US5050429A · kind A · utility
99Cited by
1References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 20, 1990 |
| Grant date | Sep 24, 1991 |
| Priority date | — |
| Expiry date | Feb 20, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P5/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of the bridge portions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.