Capacitive humidity sensor
US5050434A · kind A · utility
25Cited by
5References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 13, 1990 |
| Grant date | Sep 24, 1991 |
| Priority date | — |
| Expiry date | Jun 13, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive humidity sensor includes a capacitor with two metallic electrodes 12, 15, with electrode 15 formed of a moisture-permeable metallic layer. A moisture-sensitive polymer film 14 situated between the electrodes serves as a dielectric. The film 14 is advantageously chosen to be polyether imide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.