Patent · US Expired

Gas friction pump having an outlet-side helical stage

US5051060A · kind A · utility

16Cited by

3References

8Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Frank Fleischmann · Pulheim, DE
Hans-Peter Kabelitz · Cologne, DE
Hans Kriechel · Bornheim, DE
Martin Muhlhoff · Cologne, DE

Key dates

Filing date	Jul 19, 1990
Grant date	Sep 24, 1991
Priority date	—
Expiry date	Jul 19, 2010

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S415/914
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A gas friction pump has an inlet arranged to be coupled to a vessel to be evacuated; an outlet and an outlet-side pumping stage formed of a helical gas pumping channel. The pump further has a scavenging gas inlet circumferentially surrounding the helical gas pumping channel for exposing the channel to a scavenging gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.