Field emission cathodes and method of manufacture thereof
US5053673A · kind A · utility
94Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 1989 |
| Grant date | Oct 1, 1991 |
| Priority date | — |
| Expiry date | Oct 17, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J9/025
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Structures and methods of manufacture for field emission cathodes having cathode tips of minute size, whereby a block formed of pairs of substrates each having a patterned thin layer of cathode material sandwiched therebetween is sliced into a plurality of sections, to obtain array substrates each having an array of exposed regions of cathode material. A metal layer for constituting electron extraction electrodes and corresponding extraction apertures is formed over these exposed regions and appropriately shaped, after first forming mask layer portions upon the exposed cathode material regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.