Cage boat having removable slats
US5054418A · kind A · utility
39Cited by
15References
59Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 1989 |
| Grant date | Oct 8, 1991 |
| Priority date | — |
| Expiry date | May 23, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6732
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A cage boat having easily replaceable parts utilizes removable spacer rails for holding semiconductor wafers contained within a cage formed from slats removably attached to end pieces perpendicular to the slats.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.