Microvalve

US5054522A · kind A · utility

Assignees

• Burkert GmbH Werk Ingelfingen · DE
• Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

• Bernd Kowanz · Öhringen, DE
• Dirk Schmidt · Königstein, DE
• Wolfgang Ehrfeld · Karlsruhe, DE

Key dates

• Filing date: May 23, 1990
• Grant date: Oct 8, 1991
• Expiry date: May 23, 2010

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/86759
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).