Patent · US Expired

Process for producing a two-dimensionally extending metallic microstructure body with a multitude of minute openings and a tool suitable for this purpose

US5055163A · kind A · utility

10Cited by

1References

6Claims

0Family size

Assignee

Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

Wilhelm Bier · Blankenloch, DE
Asim Maner · Blankenloch, DE
Klaus Schubert · Karlsruhe, DE

Key dates

Filing date	Dec 18, 1989
Grant date	Oct 8, 1991
Priority date	—
Expiry date	Dec 18, 2009

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC25D1/10
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a process for producing a two-dimensionally extending metallic microstructure body having a multitude of minute openings the dimensions and distribution of which may be predetermined. A tool having microstructures on the surface thereof, which microstructures taper outwardly, is pressed into the electrically insulating layer of a molding material comprising an electrically insulating layer and an electrically conducting layer, so that the microstructures project at least through the insulating layer, to form an impression in the molding material. The tool is withdrawn from the molding material to form an impression in the molding material comprised of openings which taper in the direction of the electrically conducting layer. The impression of the molding material is electroplated with a metal to fill the openings with metal to form a two-dimensionally extending metallic microstructure having adjacent metal fillings and minute openings, by filling the openings in the impression to a height at which the distance between adjacent fillings corresponds at the surface of the fillings to the predetermined dimensions of the two-dimensionally extending metallic mic…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.