High-speed two-dimensional electrostatic actuator
US5055731A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1990 |
| Grant date | Oct 8, 1991 |
| Priority date | — |
| Expiry date | Jul 26, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/004
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic actuator includes a stationary element and a movable element. The stationary element has a surface which faces a surface of the moving element. Both the surface of the stationary element and the surface of the moving element have electrode lines disposed thereon, including a first set of parallel electrode lines and a second set of parallel electrode lines which are perpendicular to the lines in the first set. By facing the stationary surface and the movable surface towards each other such that the electrode lines of such surfaces are aligned, the movable element can be moved along either of two perpendicular axes when a voltage is applied to the electrode lines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.