Photosensitive member for electrophotography and process for making using electron cyclotron resonance
US5057391A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 1990 |
| Grant date | Oct 15, 1991 |
| Priority date | — |
| Expiry date | May 15, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03G5/08278
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A photosensitive member for electrophotography comprising a photoconductive layer formed on an electro- conductive support, in which the photoconductive layer is composed of an amorphous silicon germanium layer formed by electron cyclotron resonance (ECR) method and containing hydrogen and/or halogen in an amount of more than 40 at. % to 65 at. % and an amorphous silicon nitride layer formed by ECR method and containing hydrogen and/or halogen in an amount of more than 40 at. % to 60 at. %, the amorphous silicon nitride layer being laminated on the amorphous silicon germanium layer; said member exhibiting an increased sensitivity to laser rays having a long wavelength and an improved charge retention capacity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.