Patent · US Expired

Process for making a device with a three-dimensionally tapered point

US5057401A · kind A · utility

22Cited by
5References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 7, 1990
Grant dateOct 15, 1991
Priority date
Expiry dateMar 7, 2010

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/00
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

Process for preparing a pointed device by a photochemical process by coating the top and bottom surfaces of a sheet material with a light-sensitive photoresist, exposing the photoresist with light through a light-impenetrable mask in the form of an image of the device shaped with a blunt end at the tip of the point to compensate for lateral etching during the etching step, said image on the top surface being slightly offset relative to the image on the bottom surface, further exposing with light a portion of the image of the point of the device on the top surface of the sheet material, said exposure conforming generally to a V-shaped configuration running along the inside perimeter of the point, removing exposed photoresist, and then contacting the treated sheet material with an etchant to remove material not protected by the remaining photoresist.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.