Building and method for manufacture of integrated circuits
US5058491A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 1990 |
| Grant date | Oct 22, 1991 |
| Priority date | — |
| Expiry date | Aug 27, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67727
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A building for the manufacture of integrated circuits which includes a manufacturing equipment floor with processing equipment for the manufacture of integrated circuits, a floor under the manufacturing floor has supporting equipment associated with each of the processing equipment, and an upper floor above the manufacturing floow supports a plenum system that provides at least two classes of clean air circulation to the manufacturing floor. Each piece of processing equipment is enclosed with means to separate it from the surrounding air. A clean air input of the highest class of clean air purity is provided to the processing equipment in the enclosure. The air/gas exhaust is directed through an air/gas handling system. Means are also provided to provide the surrounding areas a clean air input of a lower class of clean air purity from the plenum system and the air/gas exhaust directed to an air/gas handling system. Interchangeable means are provided that are associated with the plenum system which quickly allow the change of air purity to another class of clean air purity whereby the processing equipment can be removed, replaced with another processing equipment or a new piece of p…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.