Illumination system and inspection apparatus including same
US5058982A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 10, 1990 |
| Grant date | Oct 22, 1991 |
| Priority date | — |
| Expiry date | Aug 10, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S385/901
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An illumination system particularly useful for inspecting a workpiece by an optic scanner includes darkfield illumination produced mainly by two elongate light sources each having a reflector focussing member and a lenticular lens sheet spreading the light from its light source over its reflector focussing member to produce an approximate image of its light source on the line to be scanned. The illumination system further includes brightfield illumination produced mainly by a third elongate light source mounted laterally of the scanner optic axis, a refractive focussing member, and a further lenticular lens sheet producing an approximate image of the third light source on the line to be scanned. A beamsplitter aligned with the scanner optic axis reflects the light from the refractive focussing member towards the workpiece, and conducts therethrough both the darkfield and brightfield illumination reflected from the workpiece to the optic scanner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.