Charged particle beam generating apparatus of multi-stage acceleration type
US5059859A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1990 |
| Grant date | Oct 22, 1991 |
| Priority date | — |
| Expiry date | Apr 12, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam generating apparatus of multi-stage acceleration type includes a charged particle beam source and a multi-stage acceleration tube having a plurality of acceleration electrodes arranged in cascade over a plurality of stages within the tube. A plurality of outer shield electrodes are disposed in concentrical relation on the radially outer side of the multi-stage acceleration tube over the plural stages to be applied with the same potentials as those of the associated acceleration electrodes respectively. Finally, a plurality of dividing resistors are disposed outside of the multi-stage acceleration tube or between the outer shield electrodes and the multi-stage acceleration tube so as to apply predetermined potentials to the acceleration electrodes, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.