Method of producing an electron beam emission cathode
US5061357A · kind A · utility
0Cited by
0References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 15, 1990 |
| Grant date | Oct 29, 1991 |
| Priority date | — |
| Expiry date | Oct 15, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/067
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A coating of lanthanum hexaboride LaB.sub.6 is sputtered on a substrate, preferably an electrically conductive substrate such as tungsten, in an insert gas atmosphere and at a pressure in the range of 2 to 50.times.10.sup.-3 torr. The coated substrate is subsequently heated to a temperature in the range of 750.degree. C. to 1000.degree. C. in a non-oxidizing atmosphere to provide an adherent, dense, smooth LaB.sub.6 coating on the substrate, suitable for use as an electron beam emission cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.