Radiation sensitive materials
US5061599A · kind A · utility
18Cited by
15References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 1990 |
| Grant date | Oct 29, 1991 |
| Priority date | — |
| Expiry date | Jan 5, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0042
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A radiation-sensitive material comprising a polyacid composed of tungsten and niobium, titanium and/or tantalum. A uniform film can be formed by an easy spin coating method. The polyacid has a radiation sensitivity higher than that of a polyacid comprising only tungsten.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.